The Department of Nuclear Engineering from the Berkeley University of California has installed some very exciting new equipment this month. An AFSEMTM scanner from GETec Microscopy (Austria) was installed within a SEM.
The scanner uses SCL’s self-sensing cantilevers with electrical readout circumventing the lack of space for optical readout within the SEM. The combination of SEM and AFM allows access to different properties at the same location of a specimen. Currently AFM topography and phase imaging is available in combination with SE and BSE detection of electrons from the SEM.